DichlorosilaneDichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. Read from the Chembox of the Wikipedia article Dichlorosilane, revision 1380138215.

Property

Value

Formula

H2Cl2Si, 101.01 g/mol

Melting point

-122 °C

Boiling point

7.85 °C

Density

4.228 g/cm³

Flash point

-37 °C

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