Silicon oxynitrideSilicon oxynitride is a ceramic material with the chemical formula SiOxNy. While in amorphous forms its composition can continuously vary between SiO2 (silica) and Si3N4 (silicon nitride), the only known intermediate crystalline phase is Si2N2O. Read from the Chembox of the Wikipedia article Silicon oxynitride, revision 1343683325.

Property

Value

Formula

N2OSi2, 100.19 g/mol

Density

2.81 g/cm³

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