TrichlorosilaneTrichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. Read from the Chembox of the Wikipedia article Trichlorosilane, revision 1380072974.

Property

Value

Formula

HCl3Si, 135.45 g/mol

Melting point

-126.6 °C

Boiling point

31.8 °C

Density

1.342 g/cm³

Flash point

-27 °C

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